Arrays of ungated GaAs field emitters fabricated by wet or dry etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 4, 1999, Pages 1553-1560

  Ducroquet, F ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644451048     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590788     Document Type: Article

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