Voltage breakdown in vacuum microelectronics microwave devices using field emitter arrays causes, possible solutions and recent progress

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1997, Pages 7-13

  Charbonnier, Francis ^a  

^a Linfield Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTRON BEAMS; ION BOMBARDMENT; MICROELECTRONIC PROCESSING; MICROWAVE DEVICES; MOLYBDENUM; VACUUM TECHNOLOGY;

FIELD EMITTER ARRAYS (FEA); VACUUM MICROELECTRONICS MICROWAVE DEVICES;

FIELD EMISSION CATHODES;

EID: 0031379618     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)