Influence of the composition of a NbNx thin-film field emitter array on emission characteristics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 623-626

  Nagao, M ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644450616     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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