Stability of field emission current from boron-doped diamond thin films terminated with hydrogen and oxygen

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 9 A/B, 1997, Pages

  Nagao, Masayoshi ^a   Kondo, Toshiyuki ^a   Gotoh, Yasuhito ^a   Tsuji, Hiroshi ^a   Ishikawa, Junzo ^a   Miyata, Koichi ^b   Kobashi, Koji ^b  

^a KYOTO UNIVERSITY   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

Chemical vapor deposition; Diamond; Emission stability; Field emission; Flicker noise; H terminated surface; Noise power; O terminated surface; Vacuum microelectronics

Indexed keywords

BORON; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; DOPING (ADDITIVES); ELECTRIC CURRENT MEASUREMENT; ELECTRIC FIELDS; HYDROGEN; MICROELECTRONICS; OXYGEN; SURFACE TREATMENT; THIN FILMS; VACUUM TECHNOLOGY;

FLICKER NOISE;

DIAMOND FILMS;

EID: 0031222086     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1250     Document Type: Article

References (19)

1. F. J. Himpsel, I. A. Knapp, J. A. VanVechten and D. E. Eastman: Phys. Rev. B 20 (1979) 624.
2. J. van der Weide, Z. Zhang, P. K. Baumann, M. G. Wensell, J. Bernholc and R. J. Nemanich: Phys. Rev. B 50 (1994) 5803.
3. N. S. Xu, Y. Tzeng and R. V. Latham: J. Phys. D 26 (1993) 1776.
4. Z. H. Huang, P. H. Cutler, N. M. Miscovsky and T. E. Sullivan: J. Vac. Sci. & Technol. B13 (1995) 526.
5. M. S. Mousa: Surf. Sci. 266 (1992) 110.
6. E. I. Givargizov, V. V. Zhirnov, A. V. Knznetsov and P. S. Plekhanov: J. Vac. Sci. & Technol. B14 (1996) 2030.
7. W. A. Mackie, J. E. Plumlee and A. E. Bell: J. Vac. Sci. & Technol. B14 (1996) 2041.
8. P. E. Pehrsson: Diamond Materials, eds. J. P. Dismukes and K. V. Ravi (The Electrochemical Society, Pennington, 1993) p. 668.
9. K. Miyata and D. L. Dreifus: Jpn. J. Appl. Phys. 33 (1994) 4526.
10. K. Miyata, K. Kumagai, K. Nishimura and K. Kobashi: J. Mater. Res. 8 (1993) 2845.
11. Y. Gotoh, M. Nagao, M. Matsubara, K. Inoue, H. Tsuji and J. Ishikawa: Jpn. J. Appl. Phys. 35 (1996) L1297.
12. M. Nagao, M. Matsubara, K. Inoue, Y. Gotoh, H. Tsuji and J. Ishikawa: Jpn. J. Appl. Phys. 35 (1996) 5479.
13. C. A. Spindt, I. Brodie, L. Humphrey and E. R. Westerberg: J. Appl. Phys. 47 (1976) 5248.
14. M. Nagao, T. Kondo, Y. Gotoh, H. Tsuji, J. Ishikawa, K. Miyata and K. Kobashi: submitted to Appl. Phys. Lett.
15. G. W. Timm and A. van der Ziel: Physica 32 (1966) 1333.
16. Ch. Kleint: Surf. Sci. 25 (1971) 394.
17. Ch. Kleint: Surf. Sci. 200 (1988) 472.
18. R. Gomer: Field Emission and Field Ionization (Harvard University Press, Cambridge, 1961).
19. A. J. Emons and K. L. Hagemans: J. Vac. Sci. & Technol. 9 (1971) 112.