Adhesion of PVD layers on liquid crystal polymer pretreated by oxygen-containing plasma

Vacuum

Volumn 79, Issue 3-4, 2005, Pages 129-133

  Wang, B ^a,b   Eberhardt, W ^a   Kuck H ^a  

^a Hahn Schickard Institute for Micro Assembly Technology   (Germany)

^b Beijing Tongmei Xtal Technology Co Ltd   (China)

Author keywords

Adhesion; Liquid crystal polymer (LCP); Metallization; Oxygen plasma pretreatment; PVD

Indexed keywords

ADHESION; ETCHING; METALLIZING; OXYGEN; PHYSICAL VAPOR DEPOSITION; PLASMAS; SPUTTERING; WETTING;

LIQUID CRYSTAL POLYMERS (LCP); MOLDED INTERCONNECT DEVICES (MID); OXYGEN PLASMA PRETREATMENT; POLAR FUNCTIONAL GROUPS;

LIQUID CRYSTAL POLYMERS;

EID: 22644441605     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.02.007     Document Type: Article

References (13)

1. K. Feldmann Proceedings of the 5th international congress on molded interconnect devices, MID 2002 2002 Meisenbach Bamberg p. 1-13
2. H. Reichl MICRO SYSTEM technologies 2003 2003 Franzis Verlag GmbH Poing p. 172-9
3. U. Scholz Untersuchungen zur Eignung des Ultraschalldrahtbondens für die Chipmontage auf MID-Substraten 2004 Shaker Verlag Aachen
4. Y. Yagi, F. Harazono, and N. Ikegawa Proceedings of the 5th international congress on molded interconnect devices, MID 2002 2002 Meisenbach Bamberg p. 99-107
5. W. Eberhardt, H. Kück, M. Münch, P. Schilling, M. Ashauer, and R. Briegel Kunstst Plast Eur 3 2003 20
6. R. Yang Adv Packag 11 2002 17
7. E.M. Liston, L. Martinu, and M.R. Wertheimer J Adhes Sci Technol 7 10 1993 1091
8. K.L. Mittal Metallized plastics 2 (fundamental and applied aspects) 1991 Plenum Press New York p. 315-6
9. N. Inagaki, S. Tasaka, and K. Hibi J Adhes Sci Technol 8 1994 395
10. F.A. Khonsari, J. Kurdi, M. Tatoulian, and J. Amouroux Surf Coat Technol 142-144 2001 437
11. B. Wang, W. Eberhardt, and H. Kück J Adhes Sci Technol 18 8 2004 883
12. M. Strobel, C.S. Lyons, and K.L. Mittal Plasma surface modification of polymers: relevance to adhesion 1994 VSP Zeist p. 286-9
13. A. Garton Infrared spectroscopy of polymer blends, composites and surfaces 1992 Sellier Druck Freising p. 1-16