Simulation of FTIR reflection spectra in non normal incidence

Journal of Physics: Conference Series

Volumn 10, Issue 1, 2005, Pages 194-197

  Zogopoulos, K ^a   Vamvakas, V Em ^a   Davazoglou, D ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22544486882     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/10/1/048     Document Type: Article

References (22)

1. Katz L E 1988 VLSI Technology 2nd edn ed S M Sze (McGraw-Hill International Editions)
2. Fair R B 1996 ULSI Technology ed C Y Chang and S M Sze (McGraw-Hill International Editions)
3. Pliskin W A and Lehman H S 1965 J. Electrochem. Soc. 112 (10) 1013
4. Boyd I W and Wilson J I B 1982 J. Appl. Phys. 53 (6) 4166
5. Pai P G, Chao S S, Takagi Y and Lucovsky G 1986 J. Vac. Sci. Technol. A 4 (3) 689
6. Lucovsky G, Fitch J T, Tsu D V and Kim S S 1989 J. Vac. Sci. Technol. A 7 (3) 1136
7. Calleja W, Falcony C, Torres A, Aceves M and Osorio R 1995 Thin Solid Films 270 114
8. Falcony C, Calleja W, Aceves M, Siqueiros J M, Machorro R, Cotta-Araiza L, Soto G and Farias M H 1997 J. Electrochem. Soc. 144 (1) 379
9. Tsu D V 2000 J. Vac. Sci. Technol. B 18 (3) 1796
10. Davazoglou D and Vamvakas V Em 2003 J. Electrochem. Soc. 150 (5) F90
11. Vamvakas V Em and Davazoglou D 2004 J. Electrochem. Soc. 151 (5) F93
12. Weldon M K, Queeney K T, Chabal Y J, Stefanov B B and K Raghavachari K 1999 J. Vac. Sci. Technol. B 17 (4) 1795
13. Queeney K T, Weldon M K, Chang J P, Chabal Y J, Gurevich A B, Sapjeta J and Opila R L 2000 J. Appl. Phys. 87 (3) 1322
14. Chabal Y J, Raghavachari K, Zhang X and Garfunkel E 2002 Phys. Rev. B 66 161315(R)
15. Queeney K T, Herbots N, Shaw J M, Atluri V and Chabal Y J 2004 Appl. Phys. Lett. 84 (4) 493
16. Kern W and Puotinen D A 1970 RCA Rev. 31 187
17. Herman I P 1996 Optical Diagnostics for Thin Film Processing (Academic Press Inc.)
18. Philipp H R 1987 Properties of Silicon (INSPEC The Institution of Electrical Engineers, EMIS) Datareview RN≤16133 1019
19. Seitz F 1940 Modern Theory of Solids (New York: McGraw-Hill)
20. Born M and Wolf E 1959 Principles of Optics (Pergammon Press)
21. Heavens O S 1991 Optical Properties of Thin Solid Films (New York: Dover Publications Inc.)
22. Roessler D M 1965 Brit. J. Appl. Phys. 16 1359