Two-dimensional birefringence profiling of optical wafers by differential phase retardation method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 3272-3278

  Shichijyo, Shiro ^a   Fujii, Shigeharu ^a   Uchida, Masao ^a   Yamada, Kazuhiro ^a  

^a MITSUI CHEMICALS INC   (Japan)

Author keywords

Birefringence distribution; Differential phase retardation; Dislocation; Inhomogeneous structure; Interferometer; Lithium niobate; Optical wafer; Refractive index

Indexed keywords

BIREFRINGENCE; CRYSTALS; DISLOCATIONS (CRYSTALS); INTERFEROMETERS; LITHIUM NIOBATE; REFRACTIVE INDEX;

BIREFRINGENCE DISTRIBUTION; DIFFERENTIAL PHASE RETARDATION; INHOMOGENEOUS STRUCTURE; OPTICAL WAFER;

OPTICAL MATERIALS;

EID: 22544474164     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3272     Document Type: Article

References (11)

1. H. Kowa and N. Umeda: Kogaku. 19 (1990) 464.
2. B. Wang: Rev. Sci. Instrum. 74 (2003) 1386.
3. B. Wang: Opt. Eng. 41 (2002) 981.
4. J. W. Jaronski and H. T. Kasprzak: Appl. Opt. 38 (1999) 7018.
5. A. D. Nurse: Appl. Opt. 36 (1997) 5781.
6. J. A. Quiroga and A. Gonzalez-Cano: Appl. Opt. 36 (1997) 8397.
7. T. W. Ng: Appl. Opt. 36 (1997) 8259.
8. Zygo Metrology Application Notes (Canon Hanbai, 2001) p. 2 [in Japanese].
9. K. Kudo and F. Uehara: Kiso Kogaku (Gendai Kogakusya, Tokyo, 1989) p. 255 [in Japanese].
10. D. H. Jundt: Optics Lett. 22 (1997) 1553.
11. A. M. Prokhorov and Y. S. Kuz'minov: Physics and Chemistry of Crystalline Lithium Niobate (Adam Hilger, New York, 1990).