High-temperature compatible nickel silicide thermometer and heater for catalytic chemical microreactors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 463-466

  Jensen, Søren ^a   Quaade, Ulrich J ^a   Hansen, Ole ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYTIC CONVERSION; HEATERS; MICROREACTORS; TEMPERATURE SENSORS; THERMAL REACTIONS;

CATALYSIS; HIGH TEMPERATURE EFFECTS; NICKEL COMPOUNDS; SENSORS; THERMOMETERS;

CHEMICAL REACTORS;

EID: 22444444978     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2005.1453967     Document Type: Conference Paper

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