Local growth of sol-gel films by means of microhotplates

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 750-753

  Calame, F ^a   Baborowski, J ^a   Ledermann, N ^a   Muralt, P ^a  

^a EPFL   (Switzerland)

Author keywords

Annealing; Biomembranes; Conductivity; Crystallization; Electrodes; Passivation; Silicides; Silicon compounds; Sputtering; Stress

Indexed keywords

ACTUATORS; ANNEALING; CRYSTALLIZATION; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRODES; MICROSYSTEMS; PASSIVATION; SILICIDES; SILICON COMPOUNDS; SILICON NITRIDE; SILICON OXIDES; SOL-GEL PROCESS; SOL-GELS; SPUTTERING; STRESSES; THIN FILMS; TRANSDUCERS; X RAY DIFFRACTION;

BIOMEMBRANES; BOTTOM ELECTRODES; MICRO HOTPLATE; MICROHOTPLATES; PASSIVATION LAYER; SOL-GEL DEPOSITION; SOLGEL FILMS; TANTALUM SILICIDE;

SOLID-STATE SENSORS;

EID: 84944745958     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215582     Document Type: Conference Paper

References (6)

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