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Volumn 31, Issue 6-7, 2005, Pages 405-410

Engineering nanocrystals of silicon

Author keywords

Anisotropic etching; Crystalline fraction; Silicon; Thin films

Indexed keywords

AMORPHOUS SILICON; ANISOTROPY; CRYSTAL ORIENTATION; ELECTRON DIFFRACTION; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTOELECTRONIC DEVICES; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTROSCOPY; VOLUME FRACTION;

EID: 22144476519     PISSN: 08927022     EISSN: None     Source Type: Journal    
DOI: 10.1080/08927020412331332695     Document Type: Conference Paper
Times cited : (7)

References (14)
  • 1
    • 22144462227 scopus 로고    scopus 로고
    • New approaches for the production of nano-, micro-, and polycrystalline silicon thin films
    • I. Roca, P. Cabarrocas. New approaches for the production of nano-, micro-, and polycrystalline silicon thin films. Phys. Stat. Sol. (c), 1(5), 1115 (2004).
    • (2004) Phys. Stat. Sol. (C) , vol.1 , Issue.5 , pp. 1115
    • Roca, I.1    Cabarrocas, P.2
  • 7
    • 0035975568 scopus 로고    scopus 로고
    • The effect of isopropyl alcohol on etching rate and roughness of (1 0 0) Si surface etched in KOH and TMAH solutions
    • I. Zubel, M. Kramkowska. The effect of isopropyl alcohol on etching rate and roughness of (1 0 0) Si surface etched in KOH and TMAH solutions. Sens. Actuators A, 93, 138 (2001).
    • (2001) Sens. Actuators A , vol.93 , pp. 138
    • Zubel, I.1    Kramkowska, M.2
  • 8
  • 10
    • 0037394369 scopus 로고    scopus 로고
    • Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition
    • D. Han, K. Wang, J. Owens, L. Gedvilas, B. Nelson, H. Habuchi, M. Tanaka. Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition. J. Appl. Phys., 93, 3776 (2003).
    • (2003) J. Appl. Phys. , vol.93 , pp. 3776
    • Han, D.1    Wang, K.2    Owens, J.3    Gedvilas, L.4    Nelson, B.5    Habuchi, H.6    Tanaka, M.7
  • 12
    • 0000865434 scopus 로고    scopus 로고
    • E.N.H. Nickel (Ed.), Academic Press, San Diego, CA
    • W. Beyer. Semiconductors and semimetals, E.N.H. Nickel (Ed.), Vol. 6, p. 165, Academic Press, San Diego, CA (1999).
    • (1999) Semiconductors and Semimetals , vol.6 , pp. 165
    • Beyer, W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.