Surface modifications during femtosecond laser ablation in vacuum, air and water

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5578, Issue PART 2, 2004, Pages 554-558

  Besner, S ^a   Degorce, J Y ^a   Kabashin, A V ^a   Meunier, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Gold; Laser ablation; Silicon; Surface modifications

Indexed keywords

ATMOSPHERIC PRESSURE; GOLD; HEAT AFFECTED ZONE; IRRADIATION; LIQUID LASERS; MICROMACHINING; MORPHOLOGY; SILICON; SURFACE TREATMENT; VACUUM; VAPORIZATION;

FEMTOSECOND LASER ABLATION TECHNIQUES; FEMTOSECOND LASER RADIATION; NANOPOROUS LAYERS; PLASMA-RELATED EFFECTS;

LASER ABLATION;

EID: 21944441924     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567746     Document Type: Conference Paper

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