Microfabrication of an integrated SU-8 waveguide with an imbedded focusing lens for application in Single Molecule Detection (SMD)

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5718, Issue , 2005, Pages 54-59

  Yang, Ren ^a   Soper, Steven A ^b   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Imbedded microlens; Integrated; Single molecule detection; SU 8; UV lithography; Waveguide

Indexed keywords

IMBEDDED MICROLENS; INTEGRATED; SINGLE MOLECULE DETECTION; SU-8; UV LITHOGRAPHY;

BIOMEDICAL ENGINEERING; FABRICATION; INTEGRATED OPTICS; LENSES; LITHOGRAPHY; MULTIPLEXING; ULTRAVIOLET RADIATION;

OPTICAL WAVEGUIDES;

EID: 21844450603     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.591956     Document Type: Conference Paper

References (6)

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