Carbon nanotube technologies for future ULSI via interconnects

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5732, Issue , 2005, Pages 37-44

  Awano, Yuji ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Carbon nanotube; Chemical Vapor Deposition; LSI interconnect; Via

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; COBALT; CRYSTALLIZATION; ELECTRIC PROPERTIES; ELECTRON DIFFRACTION; LSI CIRCUITS; MICROWAVE POWER TRANSMISSION; OPTICAL INTERCONNECTS; SEMICONDUCTOR GROWTH; SILICON WAFERS;

BALLISTIC TRANSPORT; LSI INTERCONNECTS; STRESS MIGRATION; VIA;

ULSI CIRCUITS;

EID: 21844444090     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.580083     Document Type: Conference Paper

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