Nanofabrication with ultrafast lasers at critical intensity

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5714, Issue , 2005, Pages 53-62

  Ke, Kevin ^a   Hasselbrink, Ernest ^a   Hunt, Alan J ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b 2150 GG Brown Lab / 2125 ^*  (United States)

Author keywords

Femtosecond pulsed laser; Micro TAS; Nanofluidics; Nanomachining; Optical breakdown

Indexed keywords

AMORPHOUS MATERIALS; ELECTRON BEAM LITHOGRAPHY; ELECTROOSMOSIS; GLASS; LASER PULSES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NEODYMIUM; SOLID STATE LASERS;

FEMTOSECOND PULSED LASERS; MICRO-TAS; NANOFLUIDICS; NANOMACHINING; OPTICAL BREAKDOWN;

ULTRAFAST PHENOMENA;

EID: 21844441870     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.596922     Document Type: Conference Paper

References (7)

1. D. Du, J. Squier, R. Kurtz, V. Elner, X. Liu, G. Gutmann, and G. Mourou. "Damage threshold as a function of pulse duration in biological tissue". Ultrafast Phenomena IX, ed by P. F. Barbara et al., 254-256, Springer, New York, 1995.
2. A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhofer, G. Mourou and A. J. Hunt. "A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining". Applied Physics B-Lasers and Optics, 77, 25-30, 2003
3. A. P. Joglekar, H. Liu, E. Meyhofer, G. Mourou and A. J. Hunt. "Optics at critical intensity: Applications to nanomorphing". Proceedings of the National Academy of Sciences of the United States of America 101, 5856-5861, 2004.
4. P. Pronko, S. Dutta, J. Squier, J. Rudd, D. Du, and G. Mourou. "Machining of Sub-Micron Holes using a Femtosecond Laser at 800 nm". Opt. Commun. 114, 106-110, 1995.
5. X. Liu, D. Du, and G. Mourou. "Laser ablation and micromachining with ultrashort laser pulses". IEEE journal of quantum electronics 33, 1706-1716, 1997.
6. C. Schaffer, A. Brodeur, J. Garcia, and E. Mazur. "Micromachining bulk glass using femtosecond laser pulses with nanojoule energy". Opt. Lett. 26, 93-95, 2001.
7. K. Venkatakrishnan, B. Tran, P. Stanley, and N. Sivakumar. "The effect of polarization on ultrashort pulsed laser ablation of thin metal films". J. appl. Phys. 92, 1604-1607, 2002.