Fabrication of 3-dimensional "Yablonovite" photonic crystals by multiple-exposure UV interference lithography

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5720, Issue , 2005, Pages 9-17

  Schneider, Garrett J ^a,b   Wetzel, Eric D ^c   Murakowski, Janusz ^a   Prather, Dennis W ^a,b  

^a UNIVERSITY OF DELAWARE   (United States)

^b UNIVERSITY OF DELAWARE   (United States)

^c U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Diffraction grating; Holographic lithography; Interference; Photonic bandgap; Photonic crystal; Photoresist; UV laser

Indexed keywords

DIFFRACTION GRATINGS; ENERGY GAP; HOLOGRAPHY; LASER BEAMS; LIGHT INTERFERENCE; PHOTOLITHOGRAPHY; PHOTONS; PHOTORESISTS; ULTRAVIOLET RADIATION; VECTORS;

HOLOGRAPHIC LITHOGRAPHY; PHOTONIC BANDGAP; PHOTONIC CRYSTALS; UV LASERS;

CRYSTAL STRUCTURE;

EID: 21844436828     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.591090     Document Type: Conference Paper

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