Ultrasonic transducer with thermomechanical excitation and piezoresistive detection

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1996, Pages 85-87

  Popescu, Dan S ^a   Dascalu, Dan C ^a   Elwenspoek, Miko ^a   Lammerink, Theo ^a  

^a UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; ELECTRIC EXCITATION; FABRICATION; MEMBRANES; NATURAL FREQUENCIES; RESISTORS; THERMOMECHANICAL TREATMENT; VIBRATIONS (MECHANICAL);

PIEZORESISTIVE DETECTION; POLYSILICON RING RESISTOR; SILICON BUCKLED MEMBRANE; THERMOMECHANICAL EXCITATION;

ULTRASONIC TRANSDUCERS;

EID: 0030400782     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)