Particle-in-cell Monte Carlo modeling of Langmuir probes in an Ar plasma

Journal of Applied Physics

Volumn 97, Issue 12, 2005, Pages

  Cenian, A ^a   Chernukho, A ^b   Bogaerts, A ^c   Gijbels, R ^c   Leys, C ^d  

^a INSTITUTE OF FLUID FLOW MACHINERY   (Poland)

^b A V LUIKOV HEAT AND MASS TRANSFER INSTITUTE   (Belarus)

^c UNIVERSITY OF ANTWERP   (Belgium)

^d GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSIVITY; ELECTRON TEMPERATURE; MAXWELLIAN DISTRIBUTION; ORBIT MOTION LIMITED (OMT) THEORY;

ABSORPTION; ARGON; CARRIER CONCENTRATION; COMPUTER SIMULATION; DIFFUSION IN GASES; ELECTRIC FIELDS; IONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; POISSON EQUATION; PROBLEM SOLVING;

PLASMA PROBES;

EID: 21644479927     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1938275     Document Type: Article

References (37)

1. H. Mott and I. Langmuir, Phys. Rev. 28, 727 (1926).
2. C. H. Su and S. H. Lam, Phys. Fluids 6, 1479 (1963).
3. I. M. Cohen, Phys. Fluids 6, 1479 (1963).
4. R. M. Clements and P. R. Smy, J. Appl. Phys. 0021-8979 10.1063/1.1657231 40, 4553 (1969); R. M. Clements and P. R. Smy, J. Appl. Phys. 41, 3745 (1970).
5. R. M. Clements and P. R. Smy, J. Appl. Phys. 0021-8979 10.1063/1.1657231 40, 4553 (1969); R. M. Clements and P. R. Smy, J. Appl. Phys. 41, 3745 (1970).
6. See National Technical Information Service Document No. AD 634596 (Institute for Aerospace Report No. 100 by J. G. Laframboise, 1966). Copies may be ordered from the National Technical Information Service, Springfield, VA.
7. I. D. Sudit and R. C. Woods, J. Appl. Phys. 76, 4488 (1994).
8. Z. Sternovsky, S. Robertson, and M. Lampe, J. Appl. Phys. 94, 1374 (2003).
9. Z. Zakrzewski and T. Kopiczyński, Plasma Phys. 16, 1195 (1974).
10. Z. Sternovsky and S. Robertson, Appl. Phys. Lett. 81, 1961 (2002).
11. K. Nanbu, IEEE Trans. Plasma Sci. 28, 971 (2000).
12. A. Kono, J. Phys. D 34, 1083 (2001).
13. A. Cenian, A. Chernukho, A. Bogaerts, R. Gijbels, and C. Leys, CAPPSA 2004, Proceedings of the International Workshop on Cold Atmospheric Pressure Plasmas: Sources and Applications, Ghent, Belgium, 14-16 January 2004 (University of Ghent, Ghent, Belgium, 2004), pp. 61-64.
14. A. Cenian, A. Chernukho, A. Bogaerts, and C. Leys, Khim. Fiz. 23, 3 (2004).
15. E. Kawamura and J. H. Ingold, J. Phys. D 34, 3150 (2001).
16. A. Cenian, A. Chernukho, and C. Leys, Radiat. Phys. Chem. 68, 109 (2003).
17. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, J. Appl. Phys. 73, 3657 (1993).
18. A. V. Phelps, the cross section (101597) available on ftp:jila.colorado.educollisiondataelectronneutralelectron.txt (1997).
19. A. V. Phelps, J. Appl. Phys. 76, 747 (1994).
20. S. Robertson and Z. Sternovsky, Phys. Rev. E 67, 046405 (2003).
21. H. R. Skullerud, J. Appl. Phys., J. Phys. D 1, 1567 (1968).
22. D. Piscitelli, A. V. Phelps, J. de Urquijo, E. Basurto, and L. C. Pitchford, Phys. Rev. E 68, 046408 (2003).
23. Z. Sternovsky (private communication).
24. M. J. Goeckner, J. Goree, and T. E. Sheridan, Phys. Fluids B 3, 2913 (1991).
25. G. Bachet, L. Ch́rigier, M. Carr̀re, and F. Doveil, Phys. Fluids B 5, 3097 (1993).
26. J. P. Raiser, Fizika Gazovovo Razriada (Nauka, Moscow, 1987).
27. S. M. Tarrh, M.S. thesis, Massachusetts Institute of Technology, 1972; cited by E. F. Jaeger, L. A. Berry, and D. B. Batchelor, J. Appl. Phys. 69, 6918 (1991).
28. S. M. Tarrh, M.S. thesis, Massachusetts Institute of Technology, 1972; cited by E. F. Jaeger, L. A. Berry, and D. B. Batchelor, J. Appl. Phys. 69, 6918 (1991).
29. M. A. Lieberman and A. J. Lichtenberg, in Principles of Plasma Discharges and Materials Processing (Wiley-Interscience, New York, 1994).
30. J. V. Jovanović, S. B. Vrhovac, and Z. L. Petrović, Eur. Phys. J. D 21, 335 (2002).
31. H. W. Ellis, R. Y. Pai, E. W. McDaniel, E. A. Mason, and L. A. Viehland, At. Data Nucl. Data Tables 17, 177 (1976).
32. R. Hegerberg, M. T. Elford, and H. R. Skullerud, J. Phys. B 15, 797 (1982).
33. G. Sejkora, P. Girstmair, H. C. Bryant, and T. D. Märk, Phys. Rev. A 29, 3379 (1984).
34. T. Stefansson and H. R. Skullerud, J. Phys. B 32, 1057 (1999).
35. B. Schiestl, W. Sejkora, M. Lezius, M. Foltin, P. Scheier, and T. D. Märk, in 8th International Seminar on Electron and Ion Swarm (University of Trondheim, Norwegian Institute of Technology, Trondheim, Norway, 1993), p. 65.
36. E. C. Beaty, in Ionization Phenomena in Gases, Proceedings of the Fifth International Conference (North-Holland, Amsterdam, 1961); quoted in Ref..
37. J. A. Hornbeck, Phys. Rev. 84, 615 (1951).