Fast wafer level data acquisition for reliability characterization of sub-100 nm CMOS technologies

IEEE International Integrated Reliability Workshop Final Report

Volumn , Issue , 2004, Pages 41-45

  Kerber, A ^a   Kerber, M ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG TO DIGITAL CONVERSION; COMPUTER SOFTWARE; DATA ACQUISITION; DIELECTRIC MATERIALS; DIGITAL TO ANALOG CONVERSION; ELECTRIC CONVERTERS; ELECTRIC CURRENT MEASUREMENT; GATES (TRANSISTOR); HAFNIUM COMPOUNDS; RELIABILITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DIODES;

ANTI-PARALLEL DIODES; GENERAL PURPOSE INTERFACE BUS (GPIB); PERIPHERAL COMPONENT INTERCONNECT (PCI); SOURCE MEASUREMENT UNITS (SMU);

CMOS INTEGRATED CIRCUITS;

EID: 21644467925     PISSN: 19308841     EISSN: 23748036     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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