256 × 256 focal plane array midwavelength infrared camera based on InAs/GaSb short-period superlattices

Journal of Electronic Materials

Volumn 34, Issue 6, 2005, Pages 722-725

  Walther, M ^a   Rehm, R ^a   Fuchs, F ^a   Schmitz, J ^a   Fleissner J ^a   Cabanski, W ^b   Eich, D ^b   Finck, M ^b   Rode, W ^b   Wendler, J ^b   Wollrab, R ^b   Ziegler, J ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^b AIM INFRAROT MODULE GMBH   (Germany)

Author keywords

Focal plane array; InAs GaSb SLs; Infrared camera

Indexed keywords

CAMERAS; ETCHING; INFRARED RADIATION; ION BEAMS; METALLIZING; MOLECULAR BEAM EPITAXY; SEMICONDUCTING GALLIUM COMPOUNDS; SUPERLATTICES;

FOCAL PLANE ARRAY; INAS/GASB SLS; INFRARED CAMERA; INTEGRATED DETECTORS;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 21644456811     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0010-z     Document Type: Conference Paper

References (8)

1. D.L. Smith and C. Mailhiot, J. Appl. Phys. 62, 2545 (1987).
2. D.H. Chow, R.H. Miles, T.C. Hasenberg, R.A. Kost, Y.H. Zhang, H.L. Dunlap, and L. West, Appl. Phys. Lett. 67, 3700 (1995).
3. J.L. Johnson, L. Samoska, A.C. Gossard, J.L. Merz, M.D. Jack, G.R. Chapman, B.A. Baumgratz, K. Kosai, and S.M. Johnson, J. Appl. Phys. 80, 1116 (1996).
4. F. Fuchs, U. Weimar, W. Pletschen, J. Schmitz, E. Ahlswede, M. Walther, J. Wagner, and P. Koidl, Appl. Phys. Lett. 71, 3251 (1997).
5. I. Vurgaftman, J.R. Meyer, and L.R. Ram-Mohan, J. Appl. Phys. 89, 5815 (2001).
6. H.J. Haugan, F. Smulowicz, G.J. Brown, and K. Mahalingam, Appl. Phys. Lett. 85, 5410 (2004).
7. N. Herres, F. Fuchs, J. Schmitz, K.M. Pavlov, J. Wagner, J.D. Ralston, and P. Koidl, Phys. Rev. B 53, 15688 (1996).
8. M. Walther, J. Schmitz, R. Rehm, S. Kopta, F. Fuchs, J. Fleißner, W. Cabanski, J. Ziegler, J. Cryst. Growth, 278, 156 (2005).