Challenges to tribology arisen from the development of micro- and nano-manufacturing technology

Mocaxue Xuebao/Tribology

Volumn 25, Issue 3, 2005, Pages 283-288

  Luo, Jian Bin ^a   He, Yu ^a   Wen, Shi Zhu ^a   Zhong, Jue ^b  

^a TSINGHUA UNIVERSITY   (China)

^b CENTRAL SOUTH UNIVERSITY   (China)

Author keywords

Challenge; Micro and nano manufacturing technology; Surface and interface; Tribology

Indexed keywords

FRICTION; INTERFACES (MATERIALS); LUBRICATION; REVIEWS; SURFACE TREATMENT; SURFACES; TECHNOLOGY; TRIBOLOGY;

CHALLENGE; NANO-MANUFACTURING TECHNOLOGY;

MANUFACTURE;

EID: 21544463742     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (18)

1. Nadim M. An introduction to microelectromechanical systems engineering[M]. Boston: Artech House, 2000.
2. Soong R K, Bachand G D, Neves H P, et al. Powering an inorganic nanodevice with a biomolecular motor[J]. Science, 2000, 290(5496): 1555-1558.
3. 2 slurry: preliminary experimental investigation[J]. Wear, 2004, 257(5-6): 461-470.
4. Luo J F, Dornfeld D A. Material removal mechanism in chemical mechanical polishing: theory and modeling[J]. IEEE Transaction on Semiconductor Manufacturing, 2001, 14(2): 112-118.
5. Luo J B. Polishing for atomic smooth surface[C]. In: The 4th China International Symposium on Tribology. Xi'an, Nov, 8-11, 2004.
6. Xu J, Luo J B, Lu X C, et al. Atomic scale deformation in the solid surface induced by nanoparticle impacts[J]. Nanotechnology, 2005, 16: 859-864.
7. Zhou L, Kato K, Vurens G, et al. The effect of slider surface texture on flyability and lubricant migration under near contact conditions[J]. Tribology International, 2003, 36(4-6): 269-277.
8. Peng Y Q, Lu X C, Luo J B. Nanoscale effect on ultrathin gas film lubrication in hard disk drive[J]. Journal of Tribology Transactions of The ASME, 2004, 126(2): 347-352.
9. Tanner D M, Walraven J A, Barnes S M, et al. Reliability of a MEMS torsional ratcheting actuator[C]. 39th Annual International Reliability Physics Symposium, Orlando, Floida, 2001.
10. Luo J B, Yang M C, Zhang C H, et al. Study on the cyclotriphosphazene film on magnetic head surface[J]. Tribology International, 2004, 37(7): 585-590.
11. Rechenberg I, Khyari A R E. Friction and wear of sandfish in the Sahara (in German)[DB]. www.bionik.tu-berlin.de/institut/festo04.pdf.
12. Luo J B, Shen M W, Wen S Z. Tribological properties of nanoliquid film under an external electric field[J]. Journal of Applied Physics, 2004, 96(11): 6733-6738.
13. Pyotr Kapitsa. The new encyclopaedia Britannica[M]. Chicago: Encyclopaedia Britannica, Inc, 1993. 11: 399.
14. Hirano M, Shinjo K. Atomistic locking and friction[J]. Phys Rev B, 1990, 41(17): 11837-11851.
15. Granick S. Polymer surface dynamics[J]. MRS Bulletin, 1996, 21(1): 33-36.
16. Erdemir A. The role of hydrogen in tribological properties of diamond-like carbon films[J]. Surface and Coatings Technology, 2001, 146: 292-297.
17. Kato K. Tribology of advanced ceramics and hard coatings[J]. Key Engineering Materials, 2004, 264-268: 449-452.