Measuring thermal conductivity of CVD diamond and diamond-like films on silicon substrates by holographic interferometry

Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1607-1610

  Leung, K M ^a   Cheung, A C ^a   Liu, B C ^b   Woo, H K ^a   Sun, C ^a   Shi, X Q ^c   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b TSINGHUA UNIVERSITY   (China)

^c BEIHANG UNIVERSITY   (China)

Author keywords

CVD diamond and diamond like thin films; Holographic interferometry; Thermal conductivity; Thermal diffusivity

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEFORMATION; DENSITY (SPECIFIC GRAVITY); HOLOGRAPHIC INTERFEROMETRY; MATHEMATICAL MODELS; PRESSURE; SILICON; SPECIFIC HEAT; SUBSTRATES; THERMAL CONDUCTIVITY; THERMAL DIFFUSION;

CHEMICAL VAPOR DEPOSITION DIAMOND; DIAMOND LIKE THIN FILMS; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; INTERFERENCE FRINGE PATTERN; MICROWAVE CHEMICAL VAPOR DEPOSITION; THERMAL DIFFUSIVITY;

DIAMOND FILMS;

EID: 0032594268     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00027-8     Document Type: Article

References (7)

1. J.E. Graebner, S. Jin, G.W. Kammlott, B. Bacon, L. Seibles, J. Appl. Phys. 71 (1992) 5353.
2. T.R. Anthony, J.L. Fleisher, J. Appl. Phys. 69 (1991) 8122.
3. J.E. Graebner, Recent developments in the thermal conductivity of CVD diamond, Adv. New Diamond Sci. Technol. (1994) 345-351.
4. Y.Q. Gunge et al., Thermal diffusivity measurement of thin films, High Temp.-High Pressures 25 (1993) 553-559.
5. G. Lu, R. Enck, A. Feldman et al., Thermal conductivity round-robin testing, in: Proceedings Fourth International Conference on the New Diamond Science and Technology, Kobe, Scientific Publishing Division of MYO, Tokyo (Japan), 1994, p. S8-2.
6. S. Albin, Thermal diffusivity of diamond films, SPIE J. 1145 (1989) 85-94.
7. C.M. Vest, Holographic Interferometry, Wiley, New York, 1979.