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Volumn 74, Issue 1, 2005, Pages 553-559

The dependence of the sporicidal effects on the power and pressure of RF-generated plasma processes

Author keywords

Bacillus stearothermophilus spores; Radio frequency plasma processes; Sporicidal effect

Indexed keywords

ETCHING; SCANNING ELECTRON MICROSCOPY; STERILIZATION (CLEANING); TAILINGS; ULTRAVIOLET RADIATION;

EID: 21444435189     PISSN: 00219304     EISSN: None     Source Type: Journal    
DOI: 10.1002/jbm.b.30239     Document Type: Article
Times cited : (24)

References (23)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.