Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5347, Issue , 2004, Pages 195-204

  Venkataraman, Sriram ^a   Murakowski, Janusz ^a   Schneider, Garrett ^a   Prather, Dennis ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

DRIE; MEMS; Silicon micromachining; Three dimensional photonic crystals

Indexed keywords

DRIE; MEMS; SILICON MICROMACHINING; THREE-DIMENSIONAL PHOTONIC CRYSTALS;

CRYSTAL STRUCTURE; CRYSTAL SYMMETRY; CRYSTALLINE MATERIALS; ENERGY GAP; ETCHING; INTEGRATED OPTICS; MICROMACHINING; SILICON;

MICROOPTICS;

EID: 2142847273     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524659     Document Type: Conference Paper

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