Presculpting of photoresists using additive lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5347, Issue , 2004, Pages 85-94

  Pitchumani, Mahesh ^a   Mohammed, Waleed ^a   Hockel, Heidi ^a   Johnson, Eric G ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Additive lithography; Beam shaping; Micro optics; Pre sculpting; Reflow; Refractive optics

Indexed keywords

ADDITIVE LITHOGRAPHY; BEAM SHAPING; PRE SCULPTING; REFLOW; REFRACTIVE OPTICS;

ADDITIVES; CHARGE COUPLED DEVICES; LIGHT MODULATION; MASKS; MICROLENSES; MICROOPTICS; OPTICAL DEVICES; REFRACTIVE INDEX;

PHOTORESISTS;

EID: 2142839732     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538385     Document Type: Conference Paper

References (9)

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