The Temperature Compensation of the Silicon Piezo-Resistive Pressure Sensor Using the Half-Bridge Technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5343, Issue , 2004, Pages 292-301

  Peng, K H ^a   Uang, C M ^a   Chang, Y M ^b  

^a I SHOU UNIVERSITY   (Taiwan)

^b YUNG TA INSTITUTE OF TECHNOLOGY AND COMMERCE   (Taiwan)

Author keywords

Constant current mode; Constant voltage mode; Half bridge technique; Piezoresistive; Pressure sensor; Temperature compensation

Indexed keywords

BIOTECHNOLOGY; ELECTRIC RESISTANCE; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; RESISTORS; SENSORS; SILICON;

CONSTANT CURRENT MODES; CONSTANT VOLTAGE MODES; HALF BRIDGE TECHNIQUE; PIEZORESISTIVE; PRESSURE SENSORS; TEMPERATURE COMPENSATION;

MECHANICAL ENGINEERING;

EID: 2142821054     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.527387     Document Type: Conference Paper

References (11)

1. M. Akbar and M. A. Shanblatt, "Temperature compensation of piezoresistive pressure sensors", Sensors and Actuators, Vol.33, No.3, pp. 155-162, 1992.
2. W. H. Ko, J. Hynecek, and S. F. Boettcher, "Development of a miniature pressure transducer for biomedical applications", IEEE Trans. Electron Devices, ED-26, pp. 1896-1905, 1979.
3. P. T. Hsieh, Y. M. Chang, J. M. Xu, and C. M. Uang. "Double bridge technique for temperature compensation of piezoresistive pressure sensor", SPIE, Smart Structures and Integrated Systems, Vol.4701, pp.627-633, 2002.
4. G. Kowalaski, "Miniature pressure sensors and their temperature compensation", Sensors and Actuators, 11, pp.367-376, 1987.
5. H. Tanigawa, T. Ishihara, M. Hirata, and K. Suzuki, "MOS integrated silicon pressure sensor", IEEE Trans, Electron Devices. ED-32, pp. 1191-1195, 1985.
6. Mark Parsons, Tony Allen, and Alec M. Makdessian, MAX1452 Reference Manual, MAXIM Integrated Products, Inc. Sunnyvale, CA, 2000.
7. M. Akbar and M. A. Shanblatt, "A fully integrated temperature compensation technique for piezoresistive pressure sensors", IEEE Trans. On Instrum. Meas. Vol.42, No.3, pp.771-775, 1993.
8. C. G.Hou, "A pressure sensor made of two piezoresistive bridges", IEEE Instrum. and Meas. Technology Conference, pp.506-512, 1996.
9. S. M. Sze, Semiconductor Sensors, chapter 4, Wiley-Interscience, New York, 1994.
10. Dr. Janusz Brysek, Dr. Kurt Petersen, Mr. Joseph R. Mallon, Jr., Dr. Lee Christel and Dr. Farzad Pourahmadi, Silicon Sensors and Microstructures, chapter 8, Silicon Valley, 1991.
11. S.M. Sze, Semiconductor Devices Physics and Technology, chapter 2, Wiley-Interscience, New York, 1985.