Double bridge technique for temperature compensation of piezoresistive pressure sensor

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4701, Issue , 2002, Pages 627-633

  Hsieh, P T ^a   Chang, Y M ^a,b   Xu, J M ^a,b   Uang, C M ^a  

^a I SHOU UNIVERSITY   (Taiwan)

^b Taiwan Silicon Microelectronics Corp   (Taiwan)

Author keywords

Double bridge technique; Piezoresistive; Pressure sensor; Temperature compensation

Indexed keywords

COMPUTER SIMULATION; MICROSENSORS; PIEZOELECTRIC DEVICES; PRESSURE EFFECTS; THERMAL EFFECTS;

PRESSURE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036030117     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474700     Document Type: Article

References (7)

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