|
|
|
Volumn 1, Issue , 1996, Pages 506-512
|
|
Pressure sensor made of two piezoresistive bridges
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
DIAPHRAGMS;
MEASUREMENT ERRORS;
PIEZOELECTRIC DEVICES;
PRESSURE MEASUREMENT;
RESISTORS;
SENSITIVITY ANALYSIS;
THERMAL EFFECTS;
OUTPUT POLARITY;
PIEZORESISTIVE BRIDGES;
PRESSURE OFFSET;
PRESSURE SENSOR;
SILICON DIAPHRAGM;
TEMPERATURE COMPENSATION;
THERMAL SENSITIVITY DRIFT;
SENSORS;
|
|
EID: 0029702893
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (6)
|
|
References (5)
|
