Laser Processes for Prototyping and Production of Novel Microfluidic Structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5345, Issue , 2004, Pages 147-158

  Andrews, John R ^a   Gerner, Bradley ^a  

^a XEROX CORPORATION   (United States)

Author keywords

Channel; CO 2 laser; Excimer laser; Filter; Ink jet; Manufacturing; MEMS; Microfluidics; Nozzle; Wafer scale assembly

Indexed keywords

CO2 LASERS; FILTERS; INK JET PRINTERS; LASER MICROMACHINING; MICROFLUIDICS; WAFER SCALE ASSEMBLY;

EXCIMER LASERS; FLUID DYNAMICS; INTERFACES (MATERIALS); LASER PULSES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NOZZLES; PIEZOELECTRIC TRANSDUCERS; RAPID PROTOTYPING;

CARBON DIOXIDE LASERS;

EID: 2142785419     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524547     Document Type: Conference Paper

References (5)

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