Tribological characteristics of oxide layer formed on TiN coated silicon wafer

Tribology Letters

Volumn 16, Issue 4, 2004, Pages 259-263

  Cho, Chung Woo ^a   Lee, Young Ze ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Auger electron analysis; Oxide layer; Sliding test; TiN coated silicon wafer

Indexed keywords

CERAMIC COATING; COATING; SLIDING; TITANIUM NITRIDE; TRIBOLOGY; WEAR RESISTANCE;

EID: 2142758175     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:TRIL.0000015201.11935.e6     Document Type: Article

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