Super-resolution in laser annealing and ablation

Applied Physics Letters

Volumn 84, Issue 13, 2004, Pages 2391-2393

  Avrutsky, Ivan ^a   Georgiev, Daniel G ^a   Frankstein, Dmitry ^a   Auner, Gregory ^a   Newaz, Golam ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DENSITY; HEAT PROPAGATION PATTERNS; LASER ANNEALING; SUPER-RESOLUTION;

ATOMIC FORCE MICROSCOPY; DIELECTRIC FILMS; DIFFUSION; EXCIMER LASERS; EXTRAPOLATION; HEAT LOSSES; LASER PULSES; REFRACTIVE INDEX; SILICA; THERMAL CONDUCTIVITY; THIN FILMS; TITANIUM OXIDES;

LASER ABLATION;

EID: 2142751640     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1688995     Document Type: Article

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