Reduced surface roughness of solid thin films prepared by alternating-bias, radio-frequency magnetron sputtering

Journal of the Optical Society of America B: Optical Physics

Volumn 20, Issue 10, 2003, Pages 2174-2178

  Rabady, Rabi ^a   Avrutsky, Ivan ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SCATTERING; MAGNETRON SPUTTERING; MODULATION; OPTICAL WAVEGUIDES; SILICA; SURFACE ROUGHNESS;

POWER REDUCTION;

THIN FILMS;

EID: 0242332781     PISSN: 07403224     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAB.20.002174     Document Type: Article

References (9)

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