Non-contact current measurement with cobalt-coated microcantilevers

Sensors and Actuators, A: Physical

Volumn 112, Issue 1, 2004, Pages 32-35

  Goedeke, Shawn M ^a   Allison, Steve W ^a   Datskos, P G ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Cobalt; Current sensor; Fiber optic; MEMS; Microcantilever

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; COBALT; ELECTRIC CURRENT MEASUREMENT; FERROMAGNETISM; FIBER OPTICS; LIGHT EMITTING DIODES; MAGNETIC FIELDS; MECHANICAL PERMEABILITY; OPTICAL FIBERS; PHOTOMULTIPLIERS; SEMICONDUCTOR LASERS; SPUTTERING; STIFFNESS; SURFACE TOPOGRAPHY;

CURRENT SENSORS; ION MILLING TECHNIQUE; MEMS; MICROCANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142650666     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.002     Document Type: Article

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