Dual-fiberoptic microcantilever proximity sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4468, Issue , 2001, Pages 161-170

  Goedeke, S M ^a   Allison, S W ^a   Farahi, R H ^a   Rajic, S ^a   Datskos, P G ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DISTANCE MEASUREMENT; ELECTRIC CURRENTS; INTEGRATED OPTOELECTRONICS; LIGHT EMITTING DIODES; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOTION CONTROL; OPTICAL RESOLVING POWER; SENSITIVITY ANALYSIS; SINGLE MODE FIBERS;

MICROCANTILEVER-BASED SENSORS;

PROXIMITY SENSORS;

EID: 0035765524     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.452552     Document Type: Conference Paper

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