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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 4 A, 2005, Pages 1879-1882

Structure and chemical bonds of CNx films deposited by alternating irradiations of mass-separated ion beams of C+ and N +

(1) Yamamoto, Kazuhiro a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Carbon nitride; Chemical bond; CNx film; Ion beam deposition; Nanostructures

Indexed keywords

CARBON; CHEMICAL BONDS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; ION BEAMS; IRRADIATION; NANOSTRUCTURED MATERIALS; NITROGEN; POSITIVE IONS; REACTION KINETICS;

CNX FILMS; FILM STRUCTURE; ION-BEAM DEPOSITION; NANOSTRUCTURES;

CARBON NITRIDE;

EID: 21244439111 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.44.1879 Document Type: Article

Times cited : (3)

References (21)

1
- 20444373328
- A. Y. Liu and M. L. Cohen: Science 245 (1989) 841.
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 24544461001
- K. M. Yu, M. L. Cohen, E. E. Haller, W. L. Hansen, A. Y. Liu and I. C. Wu: Phys. Rev. B 49 (1994) 5034.
- (1994) Phys. Rev. B , vol.49 , pp. 5034
- Yu, K.M.¹ Cohen, M.L.² Haller, E.E.³ Hansen, W.L.⁴ Liu, A.Y.⁵ Wu, I.C.⁶

3
- 0027626327
- C. Niu, Y. Z. Lu and C. M. Lieber: Science 261 (1993) 334.
- (1993) Science , vol.261 , pp. 334
- Niu, C.¹ Lu, Y.Z.² Lieber, C.M.³

4
- 0033534955
- K. Yamamoto, Y. Koga, S. Fujiwara, F. Kokai, J. I. Kleimann and K. K. Kim: Thin Solid Films 339 (1999) 38.
- (1999) Thin Solid Films , vol.339 , pp. 38
- Yamamoto, K.¹ Koga, Y.² Fujiwara, S.³ Kokai, F.⁴ Kleimann, J.I.⁵ Kim, K.K.⁶

5
- 21844509437
- A. Bousetta, M. Lu and A. Bensaoula: J. Vac. Sci. & Technol. A 13 (1995) 1639.
- (1995) J. Vac. Sci. & Technol. A , vol.13 , pp. 1639
- Bousetta, A.¹ Lu, M.² Bensaoula, A.³

6
- 12044253618
- D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov and J. W. Rabalais: Phys. Rev. Lett. 73 (1994) 118.
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalais, J.W.⁵

7
- 36449000304
- S. P. Withrow, J. M. Williams, S. Prawer and D. Barbara: J. Appl. Phys. 78 (1995) 3060.
- (1995) J. Appl. Phys. , vol.78 , pp. 3060
- Withrow, S.P.¹ Williams, J.M.² Prawer, S.³ Barbara, D.⁴

8
- 77957705473
- L. Maya, D. R. Cole and E. W. Hagaman: J. Am. Ceram. Soc. 74 (1991) 1686.
- (1991) J. Am. Ceram. Soc. , vol.74 , pp. 1686
- Maya, L.¹ Cole, D.R.² Hagaman, E.W.³

9
- 0000202182
- I. F. Husein, Y. Z. Zhou, Fan Li, R. C. Allen, Chung Chan, J. Kleiman, Yu. Gudimenko and C. V. Cooper: Mater. Sci. Eng. A 209 (1996) 10.
- (1996) Mater. Sci. Eng. A , vol.209 , pp. 10
- Husein, I.F.¹ Zhou, Y.Z.² Li, F.³ Allen, R.C.⁴ Chan, C.⁵ Kleiman, J.⁶ Gudimenko, Y.⁷ Cooper, C.V.⁸

10
- 0025464039
- M. R. Wixom: J. Am. Ceram. Soc. 73 (1990) 1973.
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 1973
- Wixom, M.R.¹

11
- 0028482577
- J. Narayan, J. Ready, N. Biummo, S. M. Kanetkar, P. Tiwari and N. Parikh: Mater. Sci. Eng. B 26 (1994) 49.
- (1994) Mater. Sci. Eng. B , vol.26 , pp. 49
- Narayan, J.¹ Ready, J.² Biummo, N.³ Kanetkar, S.M.⁴ Tiwari, P.⁵ Parikh, N.⁶

12
- 0003142089
- Y. Guo and W. A. Goddard, III: Chem. Phys. Lett. 237 (1995) 72.
- (1995) Chem. Phys. Lett. , vol.237 , pp. 72
- Guo, Y.¹ Goddard III, W.A.²

13
- 0000286107
- A. Y. Liu and R. M. Wentzcovitch: Phys. Rev. B 50 (1994) 10362.
- (1994) Phys. Rev. B , vol.50 , pp. 10362
- Liu, A.Y.¹ Wentzcovitch, R.M.²

14
- 0001423233
- J. Ortega and O. F. Sankey: Phys. Rev. B 51 (1995) 2624.
- (1995) Phys. Rev. B , vol.51 , pp. 2624
- Ortega, J.¹ Sankey, O.F.²

15
- 0035269263
- K. Yamamoto, T. Watanabe, K. Wazumi, F. Kokai. Y. Koga and S. Fujiwara: Diamond Relat. Mater. 10 (2001) 895.
- (2001) Diamond Relat. Mater. , vol.10 , pp. 895
- Yamamoto, K.¹ Watanabe, T.² Wazumi, K.³ Kokai, F.⁴ Koga, Y.⁵ Fujiwara, S.⁶

16
- 0036508124
- K. Yamamoto, K. Wazumi, T. Watanabe, Y. Koga and S. Iijima: Diamond Relat. Mater. 11 (2002) 1130.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1130
- Yamamoto, K.¹ Wazumi, K.² Watanabe, T.³ Koga, Y.⁴ Iijima, S.⁵

17
- 0038183935
- K. Yamamoto, T. Watanabe, K. Wazumi and Y. Koga: Diamond Relat. Mater. 12 (2003) 1061.
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1061
- Yamamoto, K.¹ Watanabe, T.² Wazumi, K.³ Koga, Y.⁴

18
- 0342508554
- E. Yabe: Rev. Sci. Instrum. 58 (1987) 1.
- (1987) Rev. Sci. Instrum. , vol.58 , pp. 1
- Yabe, E.¹

19
- 0003459529
- Perkin-Elmer, Eden Prairie
- J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben: Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Eden Prairie, 1992) p. 40.
- (1992) Handbook of X-ray Photoelectron Spectroscopy , pp. 40
- Moulder, J.F.¹ Stickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

20
- 0347871504
- K. Yamamoto, F Kokai, Y. Koga and S. Fujiwara: New Diamond Front. Carbon Technol. 9 (1999) 289.
- (1999) New Diamond Front. Carbon Technol. , vol.9 , pp. 289
- Yamamoto, K.¹ Kokai, F.² Koga, Y.³ Fujiwara, S.⁴

21
- 0035247241
- K. Yamamoto, Y. Koga and S. Fujiwara: Jpn. J. Appl. Phys. 40 (2001) L123.
- (2001) Jpn. J. Appl. Phys. , vol.40
- Yamamoto, K.¹ Koga, Y.² Fujiwara, S.³

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