LIGA fabrication of X-ray nickel lenses

Microsystem Technologies

Volumn 11, Issue 4-5, 2005, Pages 292-297

  Nazmov, V ^a   Reznikova, E ^a   Snigirev, A ^b   Snigireva, I ^b   DiMichiel, M ^b   Grigoriev, M ^c   Mohr, J ^a   Matthis, B ^a   Saile, V ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; EMULSIONS; LIGHT ABSORPTION; LIGHT REFRACTION; LIGHT SCATTERING; NICKEL; PHOTONS; POLYMETHYL METHACRYLATES; SURFACE ROUGHNESS; X RAY LITHOGRAPHY; X RAYS;

KINOFORM LENSES; LIGA TECHNOLOGY; PHOTON ENERGY; PHOTON FLUX;

OPTICAL INSTRUMENT LENSES;

EID: 21044433447     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0435-y     Document Type: Conference Paper

References (22)

1. Snigirev A; Kohn V; Snigireva I; Lengeler B (1996) A compound refractive lens for focusing high energy X-rays. Nature 384: 49-51
2. Snigirev A; Kohn V; Snigireva I; Souvorov A; Lengeler B (1998) Focusing high-energy x rays by compound refractive lenses, Appl opt 37(4): 653-662
3. Beguiristain HR; Cremer JT; Piestrup MA; Gary CK; Pantell RH (2002) X-ray focusing with compound lenses made from beryllium. Opt Lett 27(9): 778-780
4. Aristov VV; Shabel'nikov LG; Shulakov EV; Kuznetsov SM; Yunkin VA; Grigoriev MV; Zaitsev SI (2000) Refraction X-ray optics. Surf invest 14: 3-17
5. Aristov V; Grigoriev M; Kuznetsov S; Shabelnikov L; Yunkin V; Weitkamp T; Rau C; Snigireva I; Snigirev A; Hoffmann M; Voges E (2000) X-ray refractive planar lens with minimized absorption. Appl phys lett 77(24): 4058-4060
6. Snigireva I; Snigirev A; Rau C; Weitkamp T; Aristov V; Grigoriev M; Kuznetsov S; Shabel'nikov L; Yunkin V; Hoffmann M; Voges E (2001) Holographic X-ray optical elements: transition between refraction and diffraction. Nucl Instr Meth Phys Res A467-468: 982-985
7. Kohmura Y; Okada K; Takeuchi A; Takano H; Suzuki Y; Ishikawa T; Ohigashi T; Yokosuka H (2001) High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments. Nucl Instrum Meth Phys Res A467-468: 881-883
8. Schroer CG; Tümmler J; Lengeler B; Drakopoulos M; Sigirev A; Snigireva I (2001) Compound refractive lenses. High quality imaging optics for the XFEL Proc SPIE 4143: 60-68
9. www-zeuthen.desy.de/tesla_ausstellung/folgeseiten/TdW/Vor-trag_JR_TdW.pdf
10. Rai-Choudhury P (ed.) (1997) Handbook of microlithography, micromachining, fit microfabrication, Microlithography 1. SPIE Optical Engineering Press, New York
11. Lexikon der Physik, (1999) Spektrum Akademischer Verlag, Heidelberg, Berlin
12. Lengeler B; Tümmler J; Snigirev A; Snigireva I; Raven C (1998) Transmission and gain of singly doubly focusing refractive x-ray lenses. J Appl Phys 84: 5855-5861
13. Kohn VG (2002) To the theory of x-ray refraction optics. Exact solution for parabolic medium. Letters to the JETP 76(10): 701-704 (in russian)
14. Lengeler B; Schroer C; Tümmler J; Benner B; Richwin M; Snigirev A; Snigireva I; Drakopoulos M (1999) Imaging by parabilic refractive lenses in the hard X-ray range. J Synchrotron Rad 6: 1153-1167
15. Nazmov V; Shabel'nikov L; Pantenburg FJ; Mohr J; Reznikova E; Snigirev A; Snigireva I; Kouznetsov S; DiMichiel M (2003) Kinoform X-ray lens creation in polymer materials by deep X-ray lithography. Nucl Instum Meth Phys Res B, in press.
16. Bacher W; Bade K; Matthis B; Saumer M; Schwarz R (1998) Fabrication of LIGA mold inserts. Microsyst technol 4:117-119
17. Ghica V; Glashauser W (1982) Verfahren für die spannungsfreie Entwicklung von bestrahlten Polymethylmethacrylatschichten. Deutsche Offenlegungsschrift 3039110
18. Nilson RH; Griffils SK; Ting A (2002) Modeling acoustic agitation for enhanced development of PMMA resists. Microsyst Technol 9: 113-118
19. Shabelnikov L; Nazmov V; Pantenburg FJ; Mohr J; Saile V; Yunkin V; Kouznetsov S; Pindyurin V; Snigireva I; Snigirev A (2002) X-ray lens with kinoform refractive profile created by X-ray lithography. Proc SPIE, Design and Microfabrication of Novel X-Ray Optics 4783: 176-184
20. http://www.kodak.com/US/en/motion/products/lab/tech-SO302.shtml#char
21. Reed S (1979) Electron sonde microanalysis. Mir, Moscow
22. Molier G (1947) Theorie der Streuung schneller geladener Teilchen II. Mehrfach- und Vielfachstreuung. Zeitschrift für Naturforschune 3a: 78-97