SCOPUS 정보 검색 플랫폼

Volumn 86, Issue 20, 2005, Pages 1-3

Microlens arrays with integrated pores as a multipattern photomask

Author keywords

[No Author keywords available]

Indexed keywords

GRAY SCALE PHOTOMASKS; MICROLENS ARRAYS; MULTIBEAM INTERFERENCE LITHOGRAPHY; MULTIPATTERN PHOTOMASKS;

IMAGING TECHNIQUES; MASKS; MICROSTRUCTURE; PHOTOLITHOGRAPHY; PHOTORESISTS; SUBSTRATES;

MICROLENSES;

EID: 20844461855 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1926405 Document Type: Article

Times cited : (26)

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