SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 143-147

Raman spectroscopy of doped and compensated laser crystallized polycrystalline silicon thin films

(2) Saleh, Rosari a Nickel, N H b

a UNIVERSITY OF INDONESIA (Indonesia)

b HAHN MEITNER INSTITUT (Germany)

Author keywords

Compensated polycrystalline silicon; Laser crystallization; Raman spectroscopy

Indexed keywords

BACKSCATTERING; CRYSTALLIZATION; DOPING (ADDITIVES); HYDROGEN BONDS; MICROSTRUCTURE; PHONONS; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; RESONANCE; SILICON;

FILM SHIFTS; PHOSPHOROUS CONCENTRATIONS; RAMAN BACKSCATTERING SPECTROMETRY; SILICON THIN FILMS;

THIN FILMS;

CRYSTALLIZATION;

EID: 20844457351 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.128 Document Type: Article

Times cited : (6)

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