Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

Applied Physics Letters

Volumn 86, Issue 21, 2005, Pages 1-3

  Agache, V ^a,c   Legrand, B ^a   Collard, D ^a,b   Buchaillot, L ^a   Fujita, H ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIVERSITY OF TOKYO   (Japan)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRODES; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PHOTORESISTS; REACTIVE ION ETCHING;

BLADE GEOMETRY; CAPACITIVE COUPLING; EIGENFREQUENCIES; NANOELECTROMECHANICAL RESONATORS;

RESONATORS;

EID: 20844441035     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1929873     Document Type: Article

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