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Volumn 151, Issue 4, 2004, Pages
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Mono- and Multicrystalline Silicon Characterization by Noncontacting Techniques
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
CRYSTALLINE MATERIALS;
FERMI LEVEL;
INTEGRATED CIRCUITS;
PARAMETER ESTIMATION;
PERMITTIVITY;
PHOTOVOLTAIC CELLS;
RELIABILITY;
SCANNING;
SILICON WAFERS;
VOLTAGE DISTRIBUTION MEASUREMENT;
LIGHT POINT DEFECTS;
SURFACE CHARGE PROFILING (SCP);
SURFACE PHOTOVOLTAGE;
SILICON;
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EID: 2042505698
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1650838 Document Type: Article |
Times cited : (1)
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References (13)
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