Fabrication of magnetic nanostructures using KrF lithography

2004 4th IEEE Conference on Nanotechnology

Volumn , Issue , 2004, Pages 65-67

  Singh, Navab ^a,b   Goolaup, S ^b   Adeyeye, A O ^b  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Lift off; Lithography; Magnetic nanostructures; Nanofabrication; Phase shift mask

Indexed keywords

LIFT-OFF; MAGNETIC NANOSTRUCTURES; NANOFABRICATIONS; PHASE SHIFT MASKS;

DATA STORAGE EQUIPMENT; ETCHING; FABRICATION; LITHOGRAPHY; MASKS; NANOSTRUCTURED MATERIALS; PHASE SHIFT; PROTECTIVE COATINGS;

KRYPTON;

EID: 20344405007     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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