Ni-P-CNTs nanocomposite film for MEMS applications

2004 4th IEEE Conference on Nanotechnology

Volumn , Issue , 2004, Pages 192-194

  Shen, Guang Ren ^a   Tsai, Li Nuan ^a   Chao, Tzu Yuan ^a   Cheng, Y T ^a   Lin, T K ^b   Hsu, Wensyang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b HWA HSIA INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Carbon Nanotube; Electro Thermal microactuator; Electroless Plating; Nanocomposite; Nickel

Indexed keywords

COLLOIDAL PLATING; ELECTRO-THERMAL MICROACTUATOR; LOW POWER MICROSYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS);

CMOS INTEGRATED CIRCUITS; COLLOIDS; ELASTIC MODULI; ELECTROLESS PLATING; ENERGY DISPERSIVE SPECTROSCOPY; HARDNESS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NICKEL; NICKEL COMPOUNDS; SYNTHESIS (CHEMICAL); THIN FILMS;

CARBON NANOTUBES;

EID: 20344389301     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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