Dielectric films for Si solar cell applications

Journal of Electronic Materials

Volumn 34, Issue 5, 2005, Pages 564-570

  Sopori, Bhushan ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

Plasma enhanced chemical vapor deposition (PECVD); SiNiH; Solar cell fabrication

Indexed keywords

ANTIREFLECTION COATINGS; DIELECTRIC FILMS; FABRICATION; HIGH TEMPERATURE EFFECTS; HYDROGEN; OXYGEN; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SILICON COMPOUNDS; SILICON WAFERS;

OXYGEN-RICH WAFERS; SELF-ALIGNING TECHNIQUES; SINIH; SOLAR CELL FABRICATION;

SOLAR CELLS;

EID: 20344383507     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0066-9     Document Type: Conference Paper

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