Silicon nitride processing for control of optical and electronic properties of silicon solar cells

Journal of Electronic Materials

Volumn 32, Issue 10, 2003, Pages 1034-1042

  Sopori, Bhushan ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

Antireflection coatings; Defects; Impurities; Metallization; Passivation; Silicon nitride; Solar cells

Indexed keywords

ANTIREFLECTION COATINGS; DEFECTS; DIFFUSION; ELECTRONIC PROPERTIES; IMPURITIES; METALLIZING; OPTICAL PROPERTIES; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; SILICON SOLAR CELLS;

METAL CONTACT FIRING; NITRIDATION;

THIN FILMS;

EID: 0242273208     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-003-0086-2     Document Type: Article

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