Fabrication of nano-scale optical patterns in amorphous silicon carbide with focused ion beam writing

Vacuum

Volumn 79, Issue 1-2, 2005, Pages 100-105

  Tsvetkova, T ^a   Takahashi, S ^b   Zayats, A ^b   Dawson, P ^b   Turner, R ^b   Bischoff, L ^c   Angelov, O ^d   Dimova Malinovska, D ^d  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^d Central Laboratory of Solar Energy and New Energy Sources   (Bulgaria)

Author keywords

Amorphous silicon carbide (a SiC:H); Focused ion beams; Nano scale optical data storage; Scanning near field optical microscopy (SNOM)

Indexed keywords

ALUMINUM; AMORPHOUS MATERIALS; COATINGS; DEPOSITION; FABRICATION; HYDROGENATION; ION BEAMS; NANOSTRUCTURED MATERIALS; NEAR FIELD SCANNING OPTICAL MICROSCOPY; THIN FILMS;

ACID VAPORS; AMORPHOUS SILICON CARBIDE (A-SIC:H); FOCUSED ION BEAMS; NANOSCALE OPTICAL DATA STORAGE; SCANNING NEAR FIELD OPTICAL MICROSCOPY (SNOM);

SILICON CARBIDE;

EID: 20344376454     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.02.001     Document Type: Article

References (18)

1. J.A. Powell, and L. Matus G.L. Harris C.Y.W. Yang Amorphous and crystalline silicon carbide 1989 Springer Berlin
2. J. Kanicki Amorphous and microcrystalline semiconductor devices 1991 Artech House Boston, London
3. J. Heinrich, S. Hemeltjen, and G. Marx Microchim Acta 133 2000 209
4. J. Bullot, and M.P. Schmidt Phys Status Solidi B 143 1987 345
5. J.K. Hirvonen Ion implantation and ion beam processing of materials 1984 North Holland Amsterdam
6. J.F. Ziegler Ion implantation 1988 Academic Press New York
7. B. Ruttensperger, G. Krötz, G. Müller, G. Derst, and S. Kalbitzer J Non-Cryst Solids 137-138 1991 635
8. G. Müller Nucl Instrum Methods B 80-81 1993 957
9. K. Böhringer, K. Jousten, and S. Kalbitzer Nucl Instrum Methods B 30 1988 289
10. T. Tsvetkova J. Singh S. Copley J. Mazumder Beam processing of advanced materials 1996 ASM International Metals Park 207
11. T. Tsvetkova, N. Tzenov, M. Tzolov, D. Dimova-Malinovska, G.J. Adriaenssens, and H. Pattyn Vacuum 63 2001 749
12. L. Bischoff, J. Teichert, S. Kitova, and T. Tsvetkova Vacuum 69 2003 73
13. T. Tsvetkova, O. Angelov, M. Sendova-Vassileva, D. Dimova-Malinovska, L. Bischoff, G.J. Adriaenssens, W. Grudzinski, and J. Zuk Vacuum 70 2003 467
14. G. Binnig, C.F. Quate, and C.h. Gerber Phys Rev Lett 56 1986 930
15. G. Friedbacher, and H. Fuchs Pure Appl Chem 71 1999 1337
16. E. Betzig, and J.K. Trautman Science 257 1992 189
17. D.W. Pohl D. Courjon Near field optics 1993 Dordrecht Kluwer Academic Publishers
18. Tsvetkova T, Takahashi S, Zayats AV, Dawson P, Turner R, Bischoff L, Angelov O, Dimova-Malinovska D. Vacuum, to be published, doi:10.1016/j.vacuum. 2005.02.002.