Integrated silicon microspectrometers

IEEE Instrumentation and Measurement Magazine

Volumn 4, Issue 3, 2001, Pages 34-38

  Kong, Seong Ho ^a   Correia, José Higino ^b   de Graaf, Ger ^a   Bartek, Marian ^a   Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF COIMBRA   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ETCHING; FABRY-PEROT INTERFEROMETERS; INFRARED DETECTORS; INSPECTION; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING; QUALITY CONTROL; SPECTROMETERS;

ELECTROCHEMICALLY CONTROLLED ETCHING; INFRARED ABSORPTION; SILICON MICROSPECTROMETERS;

SILICON SENSORS;

EID: 0035450419     PISSN: 10946969     EISSN: None     Source Type: Journal    
DOI: 10.1109/5289.953457     Document Type: Article

References (13)

1. Surface micromachined tuneable interferometer array
2. Single-chip CMOS optical micro-interferometer
3. Bulk micromachined tunable fabry-perot micro-interferometer for the visible spectral range
4. High-selectivity single-chip spectrometer in silicon for operation in the visible part of the spectrum
5. Miniaturized spectrometer employing planner waveguides and grating couplers for chemical analysis
6. A miniature fabry-perot interferometer with a corrugated silicon diaphragm support
7. Integrated microspectrometer based on a diffraction grating
8. Integrated grating/detector array fabricated in silicon using micromachining techniques
9. Anisotropically etched silicon mirrors for optical sensor applications
10. Backside-illuminated silicon photodiode array for an integrated spectrometer
11. Silicon micromachined infrared sensor with tunable wavelength selectivity for application in infrared spectroscopy
12. Miniature spectrometers for biochemical analysis