Evolution of surface waviness in thin films via volume and surface diffusion

Journal of Applied Physics

Volumn 97, Issue 1, 2005, Pages

  Panat, Rahul ^a   Hsia, K Jimmy ^a,b   Cahill, David G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION KINETICS; LAPLACE EQUATION; SURFACE DIFFUSION; SURFACE WAVINESS;

COMPRESSIVE STRESS; DIFFUSION; ELASTIC MODULI; HIGH TEMPERATURE EFFECTS; LAPLACE TRANSFORMS; MASS TRANSFER; PERTURBATION TECHNIQUES; STRAIN; SURFACE ROUGHNESS; SURFACE WAVES; TENSILE STRESS;

THIN FILMS;

EID: 19944430826     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1827920     Document Type: Article

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