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Volumn 248, Issue 1-4, 2005, Pages 62-65
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Study of hot-carrier-induced photon emission from 90 nm Si MOSFETs
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Author keywords
Hot carrier luminescence; MOSFET; Photon emission; Semiconductor device models; Substrate current
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
ELECTRIC CURRENTS;
ELECTRIC FIELDS;
ELECTRON TRANSITIONS;
LUMINESCENCE;
MICROSCOPIC EXAMINATION;
MOSFET DEVICES;
PHOTOEMISSION;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MODELS;
SILICON;
SUBSTRATES;
THERMAL EFFECTS;
TRANSISTORS;
HOT CARRIER LUMINESCENCE;
NIR MICROSCOPY;
PHOTON EMISSION;
SUBSTRATE CURRENT;
PHOTONS;
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EID: 19944408359
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2005.03.033 Document Type: Conference Paper |
Times cited : (13)
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References (14)
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