New negative-type photosensitive alkaline-developable semi-aromatic polyimides with low dielectric constants based on poly(amic acid) from aromatic diamine containing adamantyl units and alicyclic dianhydrides, a cross-linker, and a photoacid generator

Polymer Journal

Volumn 37, Issue 4, 2005, Pages 270-276

  Watanabe, Yasufumi ^a   Shibasaki, Yuji ^a   Ando, Shinji ^a   Ueda, Mitsuru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Alicyclic; Alkaline Developer; Low Dielectric Constants; Photosensitive Polymer; Polyimides; Refractive Indices

Indexed keywords

AROMATIC COMPOUNDS; CROSSLINKING; PERMITTIVITY; PHOTOSENSITIVITY; POLYMERS; REFRACTIVE INDEX; RING OPENING POLYMERIZATION; THERMODYNAMIC STABILITY;

ALICYCLIC; ALKALINE DEVELOPER; LOW DIELECTRIC CONSTANTS; PHOTOSENSITIVE POLYMERS; REFRACTIVE INDICES;

POLYIMIDES;

EID: 19944391583     PISSN: 00323896     EISSN: None     Source Type: Journal    
DOI: 10.1295/polymj.37.270     Document Type: Article

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