Thermal distribution microfluidic sensor based on silicon

Sensors and Actuators, B: Chemical

Volumn 108, Issue 1-2 SPEC. ISS., 2005, Pages 943-946

  Weiping, Yan ^a   Chong, Liu ^a   Jianhua, Li ^a   Lingzhi, Ma ^a   Defang, Niu ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Microfluidic sensor; Ni temperature sensor; NiCr micro heater; Thermal distribution model

Indexed keywords

BIOCHEMICAL ENGINEERING; HEATING; MICROELECTRONICS; NICKEL; SILICON; THERMAL EFFECTS; THIN FILMS;

MICROFLUIDIC SENSORS; NI TEMPERATURE SENSOR; NICR MICRO-HEATER; THERMAL DISTRIBUTION MODELS;

CHEMICAL SENSORS;

EID: 19944378466     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.01.036     Document Type: Conference Paper

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