Nano structure formation by gas cluster ion beam irradiations at oblique incidence

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 232, Issue 1-4, 2005, Pages 212-216

  Toyoda, Noriaki ^a   Mashita, Takahumi ^a   Yamada, Isao ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion; Oblique incidence; Ripple formation

Indexed keywords

GASES; IONIZATION; IRRADIATION; KINETIC ENERGY; NANOSTRUCTURED MATERIALS; SECONDARY ION MASS SPECTROMETRY; SURFACE ROUGHNESS; TOPOLOGY;

CLUSTER ION; OBLIQUE INCIDENCE; RIPPLE FORMATION; RIPPLE STRUCTURES;

ION BEAMS;

EID: 19944374107     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.03.047     Document Type: Conference Paper

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